Title :
Tunable quality factor through 1:1 modal coupling in a disk resonator
Author :
Ian B. Flader;Chae H. Ahn;Yushi Yang;Eldwin J. Ng;Vu A. Hong;Jeesu Baek;Thomas W. Kenny
Author_Institution :
Department of Mechanical Engineering, Stanford University, Stanford, CA
Abstract :
We have investigated the impact on the dynamics of MEMS resonators arising from coupling between independent modes. If the coupled mode has a higher Q or a lower Q than the driven mode, we find that the effective Q of the driven mode can be tuned over a wide range, which has important implications for inertial sensors and oscillators. In this paper, we report on two cases - one where the coupled mode has a high Q and one where the coupled mode has a low Q, and we demonstrate the ability to tune the effective Q of the drive mode. We use frequency sweep and ring-down methods to characterize these systems, and identify important distinguishing capabilities of these approaches.
Keywords :
"Couplings","Q-factor","Tuning","Resonant frequency","Gyroscopes","Frequency-domain analysis"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370485