• DocumentCode
    3721975
  • Title

    A new method for measuring the temperature-dependent dielectric constant of the PDMS fluids

  • Author

    Qing-Ying Ren;Li-Feng Wang;Qing-An Huang

  • Author_Institution
    Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    A new method is described for measuring the temperature-dependent dielectric constant of the PDMS fluids by using a low cost MEMS sensor. The dielectric constant of the PDMS fluids is obtained by measuring the capacitance of a MEMS temperature sensor, which uses PDMS fluids as its sensitive material. Despite properties of the PDMS fluids in different temperature plays an important role in practical applications, few designs for measuring the relative static dielectric constant and the thermal expansion coefficient over different temperature have been developed. We construct a theoretical model which describes the behavior of the relative static dielectric constant and the thermal expansion coefficient over a certain range of temperatures. Preliminary experimental results show that the variation of the relative static dielectric constant and the thermal expansion coefficient versus temperature could be detected simply based on this method.
  • Keywords
    "Temperature measurement","Dielectric constant","Temperature sensors","Dielectric measurement","Fluids","Temperature","Capacitance"
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2015 IEEE
  • Type

    conf

  • DOI
    10.1109/ICSENS.2015.7370518
  • Filename
    7370518