An electrochemical seismometer with frequency features under regulation

This paper presents a MEMS based electrochemical seismometer with controllable insulating layers, enabling the active regulation of the frequency characteristics of the sensors. More specifically, the insulating layers were made of spin-coating SU-8 photoresist, and thus the thickness can be fine tuned by regulating the spin-coating speed. Moreover, the frequency characteristics of a series of devices with diverse structure parameters were studied experimentally. It was found that the frequency characteristics can be effectively modulated by adjusting the structure parameters of the sensing unit, including the diameter of the electrode pores and the thickness of the insulating layers.