Title :
Underwater observation of vibration behavior of the miniature circular piezoelectric micromachined ultrasonic transducers
Author :
Daisuke Akai;Makoto Ishida;Daisuke Takashima
Author_Institution :
Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Japan
Abstract :
This paper presents the vibration behavior of the miniature circular piezoelectric micromachined ultrasonic transducers (pMUTs) under water for the first time As the results of the FSI analysis, the vibration modes and resonant frequencies were successfully observed and compared to the scanning LDV measurements. According to these result, some vibration mode and resonant frequencies were appeared in frequency range from 0.1 MHz to 10 MHz which were good agreement between FSI analysis and the LDV measurements. This result will contribute to design and analyze the pMUTs for the medical endoscopic applications.
Keywords :
"Vibrations","Resonant frequency","Films","Frequency measurement","Analytical models","Monitoring","Ultrasonic transducers"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370611
