MoS2 nanosensors fabricated by dielectrophoretic assembly for ultrasensitive and rapid sensing of volatile organic compounds

This paper presents a novel process to fabricated MoS₂ gas sensor. We use dielectrophoresis force (DEP) to manipulate MoS₂ nano flakes, and assemble them onto the Au nano electrode, which was fabricated by focused ion beam. Compared to the traditional process, such as CVD, dielectrophoretic assembly has the advantages of ease of fabrication, room-temperature process, localized precise material deposition, and rapid process. In this study, we realize on-chip gas sensors based on dielectrophoretically-assembled MOS₂ for vapor sensing. From the characterization, the developed MoS₂ nanosensors exhibit excellent signal-to-noise ratio compared to other nanomaterial-based nanosensors, such as graphene and TiO₂ nanowire.