Optimization of loss tangent and capacitor area of micro vacuum dielectric capacitors

A compact model of the loss tangent of the vacuum dielectric capacitor (VDC) in terms of the size of the VDC, capacitance, and ratio of the width of the boundary sealant to the width of the top electrode is presented in this paper. An analytical tool that can determine the optimal size of a VDC to achieve the desired trade-off between the capacitance and loss tangent is described. Although the VDC with a single type of sealant was used as an example to illustrate the idea, the presented methodology is general and can be applied for VDCs constructed with other sealant materials.