MEMS energy harvesting device driven by ambient vibrations

An efficient method for energy harvesting through MEMS based devices, driven by ambient vibrations is presented. This particular method relies on the utilization of time varying magnetic fields to induce electromotive forces which in turn drive current through coils fabricated on a substrate. This allows for the conversion of energy contained within naturally occurring vibrations to usable forms of electrical energy. The process primarily hinges on fundamental principals in electromagnetic theory related to induction. Here we propose a miniaturized MEMS energy harvester comprising of coils on a substrate measuring mere mm in dimension, two permanent magnets and a shuttle that is connected to flexible beams. The relationship between number of coil turns on the substrate, induced voltage and vibrational motion were studied and a proposed model was devised.