Title :
Dimensional metrology for smart devices using the optical comb of femtosecond pulse lasers
Author :
Jonghan Jin;Jungjae Park;Jong-Ahn Kim;Jaewan Kim
Author_Institution :
Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon, Republic of Korea
Abstract :
We have proposed the dimensional metrological methods for smart devices using the optical comb of a femtosecond pulse laser. For precision and high speed measurements, these methods were realized based on spectral-domain interferometry.
Keywords :
"Optical interferometry","Ultrafast optics","Silicon","Semiconductor device measurement","Thickness measurement","Optical variables measurement","Optical pulses"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7375869
