Title :
Physical model for subsurface silicon writing
Author :
O. Tokel;A. Turnali;I. Pavlov;F. O. Ilday
Author_Institution :
Department of Physics, Bilkent University, 06800 Ankara, Turkey
Abstract :
We have recently reported a direct laser writing method enabling buried structures deep inside silicon. Here we study the formation of these subsurface structures. We take advantage of Nonlinearity Engineering to understand this new phenomenon.
Keywords :
"Writing","Surface emitting lasers","Amorphous silicon","Surface treatment","Laser beams","Photonics"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7375985