DocumentCode :
3725993
Title :
Physical model for subsurface silicon writing
Author :
O. Tokel;A. Turnali;I. Pavlov;F. O. Ilday
Author_Institution :
Department of Physics, Bilkent University, 06800 Ankara, Turkey
Volume :
2
fYear :
2015
Firstpage :
1
Lastpage :
2
Abstract :
We have recently reported a direct laser writing method enabling buried structures deep inside silicon. Here we study the formation of these subsurface structures. We take advantage of Nonlinearity Engineering to understand this new phenomenon.
Keywords :
"Writing","Surface emitting lasers","Amorphous silicon","Surface treatment","Laser beams","Photonics"
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
Type :
conf
DOI :
10.1109/CLEOPR.2015.7375985
Filename :
7375985
Link To Document :
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