Title :
Material response of semiconductors irradiated with IR ultrashort laser pulses
Author :
Ilya Mingareev;Mark Ramme;Martin Richardson
Author_Institution :
Townes Laser Institute, The College of Optics and Photonics, University of Central Florida, 4304 Scorpius Street, Orlando, FL 32826
Abstract :
We utilize near- and mid-IR ultrafast laser radiation to investigate the processing of crystalline silicon with different dopants. A numerical model is adopted to simulate the material response depending on the wavelength and the dopant concentration.
Keywords :
"Absorption","Wavelength measurement","Silicon","Semiconductor device measurement","Radiation effects","Laser beams","Ultrafast optics"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7375986
