Title :
Experimental and numerical investigation of laser-based short wavelength plasma sources
Author :
H. Parchamy;J. Szilagyi;M. Masnavi;M. Richardson
Author_Institution :
Townes Laser Institute, College of Optics and Photonics, University of Central Florida, 4304 Scorpius Street, Orlando, Florida 32826, USA
Abstract :
Laser-based plasma lamps are of particular interest in the semiconductor industry. This study examines the optimum regions of laser-plasma operational space for a number of intense laser-irradiated mass-limited droplet source scenarios.
Keywords :
"Niobium","Plasmas","Light sources","Lithography","Sociology","Statistics","Kinetic theory"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7375987
