Title :
Displacement measurement by single-grating heterodyne interferometry
Author :
Shuhua Yan;Guochao Wang;Cunbao Lin;Yukun Luo
Author_Institution :
College of Mechatronic Engineering and Automation, National University of Defense Technology (NUDT), Hunan, Changsha, 410073, China
Abstract :
We presented a displacement measurement system based on single-grating heterodyne interferometry. Our prototype system was demonstrated to achieve a relative measurement accuracy of better than 69 nm with standard deviations of less than 28 nm.
Keywords :
"Displacement measurement","Gratings","Optical interferometry","Interferometers","Measurement by laser beam","Optical variables measurement","Phase measurement"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376014
