DocumentCode :
3726057
Title :
Fabrication of 0.7μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated etching
Author :
K. Tanaka;T. Suhara
Author_Institution :
Graduate School of Engineering, Osaka Univ., 2-1 Yamada-Oka, Suita, 565-0871, Japan
Volume :
2
fYear :
2015
Firstpage :
1
Lastpage :
2
Abstract :
We fabricated ridge waveguides in ion-sliced LiNbO3 by accelerated chemical etching in the proton-exchanged region. We obtained the low-loss waveguides of 0.7 μm2 cross-sectional area. Strongly confined guided modes were obtained at 1.55 μm wavelength.
Keywords :
"Optical waveguides","Etching","Lithium niobate","Crystals","Optical device fabrication","Acceleration"
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
Type :
conf
DOI :
10.1109/CLEOPR.2015.7376049
Filename :
7376049
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3726057
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