• DocumentCode
    3726057
  • Title

    Fabrication of 0.7μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated etching

  • Author

    K. Tanaka;T. Suhara

  • Author_Institution
    Graduate School of Engineering, Osaka Univ., 2-1 Yamada-Oka, Suita, 565-0871, Japan
  • Volume
    2
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We fabricated ridge waveguides in ion-sliced LiNbO3 by accelerated chemical etching in the proton-exchanged region. We obtained the low-loss waveguides of 0.7 μm2 cross-sectional area. Strongly confined guided modes were obtained at 1.55 μm wavelength.
  • Keywords
    "Optical waveguides","Etching","Lithium niobate","Crystals","Optical device fabrication","Acceleration"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376049
  • Filename
    7376049
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726057