Title :
Fabrication of 0.7μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated etching
Author :
K. Tanaka;T. Suhara
Author_Institution :
Graduate School of Engineering, Osaka Univ., 2-1 Yamada-Oka, Suita, 565-0871, Japan
Abstract :
We fabricated ridge waveguides in ion-sliced LiNbO3 by accelerated chemical etching in the proton-exchanged region. We obtained the low-loss waveguides of 0.7 μm2 cross-sectional area. Strongly confined guided modes were obtained at 1.55 μm wavelength.
Keywords :
"Optical waveguides","Etching","Lithium niobate","Crystals","Optical device fabrication","Acceleration"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376049