Title :
Analysis of laser induced oxidation processes with different laser powers
Author :
Feng Xia;Xinzheng Zhang;Meng Wang;Sanming Yi;Qian Liu;Jingjun Xu
Author_Institution :
The MOE Key Laboratory of Weak-Light Nonlinear Photonics, and TEDA Applied Physics Institute and School of Physics, Nankai University, Tianjin 300457, China
Abstract :
Metal-transparent-metallic-oxide (MTMO) grayscale photomasks fabricated by laser-induced oxidization are studied based on three stages oxidation theories and absorbed laser power density distribution. The calculated fabrication diameter is consistent with the experimental fabrication size.
Keywords :
"Oxidation","Fabrication","Films","Gray-scale","Density measurement","Power system measurements","Indium"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376157
