• DocumentCode
    3726172
  • Title

    Laser-induced spray jet cleaning for nanoscale contaminant removal using water-isopropyl alcohol mixtures

  • Author

    Changho Seo;Dongsik Kim

  • Author_Institution
    Department of Mechanical Engineering POSTECH, Pohang 790-784, Republic of Korea
  • Volume
    2
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this work, we demonstrate a novel laser-induced spray jet cleaning process using non-water cleaning agents including isopropyl alcohol. The process could remove <;30 nm PSL particles from silicon surfaces without watermark generation.
  • Keywords
    "Cleaning","Surface treatment","Liquids","Nanoscale devices","Watermarking","Electric breakdown","Silicon"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376165
  • Filename
    7376165
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726172