DocumentCode
3726312
Title
Development of ultrasound sensor using an SU-8 polymer based Fabry-Perot interferometer
Author
Hyunmin Yoon;Jeongmin Heo;Hyoung Won Baac;Junseok Heo
Author_Institution
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, South Korea
Volume
3
fYear
2015
Firstpage
1
Lastpage
2
Abstract
Ultrasound sensing was investigated with SU-8 polymer based Fabry-Perot interferometers consisting of TiO2/SiO2 distributed Bragg mirrors (DBRs). The DBRs are properly modified to transmit an excitation pulse laser (532 nm) generating ultrasound in all-optical transducers.
Keywords
"Ultrasonic imaging","Reflection","Reflectivity","Polymers","Optical transmitters","Transducers","Ultrasonic variables measurement"
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
Type
conf
DOI
10.1109/CLEOPR.2015.7376432
Filename
7376432
Link To Document