Title :
Development of ultrasound sensor using an SU-8 polymer based Fabry-Perot interferometer
Author :
Hyunmin Yoon;Jeongmin Heo;Hyoung Won Baac;Junseok Heo
Author_Institution :
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, South Korea
Abstract :
Ultrasound sensing was investigated with SU-8 polymer based Fabry-Perot interferometers consisting of TiO2/SiO2 distributed Bragg mirrors (DBRs). The DBRs are properly modified to transmit an excitation pulse laser (532 nm) generating ultrasound in all-optical transducers.
Keywords :
"Ultrasonic imaging","Reflection","Reflectivity","Polymers","Optical transmitters","Transducers","Ultrasonic variables measurement"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376432
