• DocumentCode
    3726312
  • Title

    Development of ultrasound sensor using an SU-8 polymer based Fabry-Perot interferometer

  • Author

    Hyunmin Yoon;Jeongmin Heo;Hyoung Won Baac;Junseok Heo

  • Author_Institution
    Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, South Korea
  • Volume
    3
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Ultrasound sensing was investigated with SU-8 polymer based Fabry-Perot interferometers consisting of TiO2/SiO2 distributed Bragg mirrors (DBRs). The DBRs are properly modified to transmit an excitation pulse laser (532 nm) generating ultrasound in all-optical transducers.
  • Keywords
    "Ultrasonic imaging","Reflection","Reflectivity","Polymers","Optical transmitters","Transducers","Ultrasonic variables measurement"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376432
  • Filename
    7376432