Title :
Integrated polarization rotator on silicon waveguides with an asymmetric trench
Author :
Yudeuk Kim;Dong Wook Kim;Moon Hyeok Lee;Min Hee Lee;Dong Eun Yoo;Ki Nam Kim;Sang Chul Jeon;Kyong Hon Kim
Author_Institution :
Department of Physics, Inha University, Incheon, 402-751, South Korea
Abstract :
We demonstrate an integrated polarization rotator with a single trench on a silicon waveguide fabricated using a single etch-step complementary metal-oxide-semiconductor (CMOS)-compatible process. The measured polarization rotation efficiency is 95 % with 0.76 dB insertion loss for a total 67-μm long and 100-nm wide asymmetric trench.
Keywords :
"Optical waveguides","Silicon","Semiconductor waveguides","Optimized production technology","Semiconductor device measurement","Rotation measurement","Yttrium"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376557
