Process selection based on overall process yield

Comparing the capability of processes is an essential task in the manufacturing industry. Selecting the process with a higher yield is critical to maintaining production quality and cost. With the miniaturization of physical dimensions and lower power consumptions, microelectromechanical systems (MEMS) are widely applied in various domains. This research compares two processes that produce the pre-amplifier of MEMS sensors. Three quality characteristics were investigated: pre-amplifier gain, absolute reference voltage, and module quiescent current. To integrate process capability in multiple dimensions, a measurement for evaluating the overall performance is required. This research applies the overall process yield index to identify the process with a higher overall yield when simultaneously monitoring the three features.