Aqueous imaging by SEM-CT system inside environmental-SEM

This paper presents the aqueous observation of three-dimensional internal information using scanning election microscope-computed tomography (SEM-CT) inside an environmental-SEM (E-SEM). For this purpose, it is required to control the sample temperature by controlling sample chamber pressure of the E-SEM. In this paper, a cooling system was installed into the SEM-CT system to decrease the sample temperature. The aqueous observation was confirmed by the E-SEM and SEM-CT observations using sodium polyacrylate particles as a sample.