Title :
Impacts of atomically flat Si (111) surfaces on novel photonic crystal designs
Author :
Alyssa Prasmusinto;Abdelrahman Al-Attili;Hideo Arimoto;Shinichi Saito
Author_Institution :
Electronics and Computer Science, Faculty of Physical Sciences and Engineering, University of Southampton, United Kingdom SO17 1BJ
fDate :
7/1/2015 12:00:00 AM
Abstract :
Characteristics of photonic crystals are very sensitive to fabrication-induced disorders due to scattering losses. Here, we propose to use atomically flat silicon (111) surfaces, defined by anisotropic wet etching. We theoretically examined the impacts of the surfaces on the novel designs of photonic crystals.
Keywords :
"Lattices","Silicon","Photonic crystals","Cavity resonators","Wet etching","Slabs"
Conference_Titel :
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
DOI :
10.1109/NANO.2015.7388778
