Quantitatively control of carbon nanotubes using real time electrical detection dielectrophoresis assembly

The suspended carbon nanotubes (CNT) are widely integrated into silicon based devices in the realm of sensors and micro/nano electromechanical systems (MEMS and NEMS). CNT integration methods have to guarantee yield, low cost, and high performances. In this paper, it reports a novel real-time dielectrophoresis (DEP) assembly method which will monitor quantity of carbon nanotubes between a localized gap. It measures impedance change through the rate of current change when nanotubes are bridged so that there is no impedance limitation. The impedance detection will be feed back to shut down the electrical field applied. The proposed method will not only work for quantitatively nanotubes assembly, but also be applicable for thin layers graphene deposition.