Title :
MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid
Author :
Mengbing Liang; Hongyu Yu;Miranda Ngan;Stella Nickerson;Elizabeth Nofen;Lenore L. Dai
Author_Institution :
School of Electrical, Computer and Energy Engineering, Arizona State University, Chandler, U.S.A
fDate :
7/1/2015 12:00:00 AM
Abstract :
This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.
Keywords :
"Accelerometers","Sensitivity","Vibrations","Transducers","Liquids","Temperature sensors"
Conference_Titel :
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
DOI :
10.1109/NANO.2015.7388833
