Title :
Fabrication of complex shape 3D photonic nanostructures by FIB lithography
Author :
Oleg Y. Rogov;Vladimir V. Artemov;Maxim V. Gorkunov;Alexander A. Ezhov;Serguei P. Palto
Author_Institution :
Shubnikov Institute of Crystallography of Russian Academy of Sciences, 119333 Moscow, Russia
fDate :
7/1/2015 12:00:00 AM
Abstract :
We report fabrication of complex 3D shape nanostructures by single-pass focused ion beam milling of freely suspended metal foils and films on dielectric substrates. The approach benefits from the accuracy in nano fabrication and decreased overdeposition. The fabricated nanostructured thin films posses optical properties valuable for photonic applications: extraordinary transmission and extreme chirality.
Keywords :
"Optical device fabrication","Optical polarization","Shape","Nanostructures","Optical arrays","Three-dimensional displays","Milling"
Conference_Titel :
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
DOI :
10.1109/NANO.2015.7388897
