• DocumentCode
    3734926
  • Title

    Silicon nanowire array fabricated with good site and size controllability

  • Author

    Zhishan Yuan; Yunfei Chen; Zhonghua Ni; Hong Yi;Yuelin Wang; Tie Li

  • Author_Institution
    School of mechanical engineering, Southeast University, Nanjing, China
  • fYear
    2015
  • fDate
    7/1/2015 12:00:00 AM
  • Firstpage
    1493
  • Lastpage
    1496
  • Abstract
    Effective and universal method to fabricate site well-defined, ordered, and homogenous size SiNWs is still necessary to support SiNWs application. In this paper, a simple and cost-effective approach to synthesis site and size controlled amorphous silicon nanowires (a-SiNWs) is reported. The position of a-SiNWs array can be simply controlled by the site of micron size Cu patterns array through photolithography. While the size of a-SiNWs can be adjust by the volume of Cu pattern.
  • Keywords
    "Silicon","Annealing","Wires","Yttrium","Arrays","Silicides"
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
  • Type

    conf

  • DOI
    10.1109/NANO.2015.7388925
  • Filename
    7388925