Title :
Robotic dual-tip assembly for nanowire handling and integration
Author :
Malte Bartenwerfer;Sergej Fatikow
Author_Institution :
Division Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, D-26129, Germany
fDate :
7/1/2015 12:00:00 AM
Abstract :
This paper presents the usage of a nanorobotic handling technique for the transfer of individual ZnO-nanowires with diameters of about 100nm and length of up to 10 μm. Handling and assembly are inside the SEM and use a dual-tip approach facilitating an easy controllable three-dimensional positioning of the nanowire. The actual handling sequence works without adhesive bond technique, therefore it operates with low-contaminations and is time saving in comparison to conventional approaches. The handled nanowires are integrated into electrode structures, establishing an field-effect transistor device, which is characterized in-situ.
Keywords :
"Robots","Electrodes","Scanning electron microscopy","Assembly","Nanoscale devices","Mechanical sensors"
Conference_Titel :
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
DOI :
10.1109/NANO.2015.7388926