Title :
Tailoring the luminescence of anodized aluminum oxide with atomic layer deposited ZnO thin films
Author :
Hong-Liang Lu; Zhang-Yi Xie;Yuan Zhang; Qing-Hua Ren;Shi-Jin Ding;David Wei Zhang
Author_Institution :
State Key Laboratory of ASIC and System, Institute of Advanced Nanodevices, School of Microelectronics, Shanghai 200433, China
fDate :
7/1/2015 12:00:00 AM
Abstract :
The combination of zinc oxide (ZnO) thin film and anodized aluminum oxide (AAO) with the assistance of atomic layer deposition (ALD) technique is performed to investigate into the luminescence tailoring effect and mechanism of such a light emitting device, considering the strong luminescence of both ZnO and AAO nanostructures. Nanoscale ZnO thin films were deposited by ALD into the nanopores of AAO template to fabricate large surface-to-volume ratio device with good mechanical and chemical stability. The photoluminescence of large surface-to-volume ratio nanostructured ZnO/AAO system exhibits tunable broad band light emission from ultraviolet to infrared. Given the investigated mechanism of this system, tailoring of luminescence can be achieved and possible applications are proposed according to experimental observations.
Keywords :
"Zinc oxide","II-VI semiconductor materials","Nanoscale devices","Luminescence","Nanostructures","Atomic layer deposition"
Conference_Titel :
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
DOI :
10.1109/NANO.2015.7388996