Title : 
Applying a large strain into graphene using thermal shrinkage of SU-8 resist
         
        
            Author : 
Makoto Takamura;Hiroki Hibino
         
        
            Author_Institution : 
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
         
        
        
            fDate : 
7/1/2015 12:00:00 AM
         
        
        
        
            Abstract : 
We investigated the use of the thermal shrinkage of SU-8 resist for applying strain into graphene grown by the chemical-vapor-deposition (CVD) method. We demonstrate that the shrinkage of resist deposited on top of graphene on a substrate induces a local tensile strain within a distance of 1-2 μm from the edge of the resist. The thermal shrinkage of SU-8 allows us to design the local strain in graphene on substrates. We also show that this method induces a large tensile strain in graphene suspended between two bars of SU-8. We expect that a much larger strain can be induced by suppressing the defects of the CVD-grown graphene.
         
        
            Keywords : 
"Graphene","Resists","Substrates","Annealing","Tensile strain","Bars"
         
        
        
            Conference_Titel : 
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
         
        
        
            DOI : 
10.1109/NANO.2015.7389011