DocumentCode
3735011
Title
Applying a large strain into graphene using thermal shrinkage of SU-8 resist
Author
Makoto Takamura;Hiroki Hibino
Author_Institution
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
fYear
2015
fDate
7/1/2015 12:00:00 AM
Firstpage
33
Lastpage
36
Abstract
We investigated the use of the thermal shrinkage of SU-8 resist for applying strain into graphene grown by the chemical-vapor-deposition (CVD) method. We demonstrate that the shrinkage of resist deposited on top of graphene on a substrate induces a local tensile strain within a distance of 1-2 μm from the edge of the resist. The thermal shrinkage of SU-8 allows us to design the local strain in graphene on substrates. We also show that this method induces a large tensile strain in graphene suspended between two bars of SU-8. We expect that a much larger strain can be induced by suppressing the defects of the CVD-grown graphene.
Keywords
"Graphene","Resists","Substrates","Annealing","Tensile strain","Bars"
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
Type
conf
DOI
10.1109/NANO.2015.7389011
Filename
7389011
Link To Document