• DocumentCode
    3735011
  • Title

    Applying a large strain into graphene using thermal shrinkage of SU-8 resist

  • Author

    Makoto Takamura;Hiroki Hibino

  • Author_Institution
    NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
  • fYear
    2015
  • fDate
    7/1/2015 12:00:00 AM
  • Firstpage
    33
  • Lastpage
    36
  • Abstract
    We investigated the use of the thermal shrinkage of SU-8 resist for applying strain into graphene grown by the chemical-vapor-deposition (CVD) method. We demonstrate that the shrinkage of resist deposited on top of graphene on a substrate induces a local tensile strain within a distance of 1-2 μm from the edge of the resist. The thermal shrinkage of SU-8 allows us to design the local strain in graphene on substrates. We also show that this method induces a large tensile strain in graphene suspended between two bars of SU-8. We expect that a much larger strain can be induced by suppressing the defects of the CVD-grown graphene.
  • Keywords
    "Graphene","Resists","Substrates","Annealing","Tensile strain","Bars"
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
  • Type

    conf

  • DOI
    10.1109/NANO.2015.7389011
  • Filename
    7389011