DocumentCode
3735722
Title
Functionalized sensor packaging based on thermoset injection molding and selective metallization technology
Author
Stefan Beichter;Sascha Weser;Hagen M?ller;Simon Petillon;Benno Haug;Thomas G?nther;Wolfgang Eberhardt;Andr? Zimmermann
Author_Institution
Hahn-Schickard Institute for Microassembly Technology, Stuttgart, Germany
fYear
2015
Firstpage
1
Lastpage
6
Abstract
The material properties of thermosets offer a versatile alternative to thermoplastic materials from state of the art MID technology. Chemical resistance, thermal conductivity, thermal expansion behavior and mechanical strength can be adapted to the applications need. Compared to transfer molding, thermoset injection molding uses cheaper materials and provides more efficient processing parameters, leading to significant advantages as encapsulation method for electronic devices. For functionalizing the encapsulated assembly, a new laser based patterning process was developed. The material surface was roughened by the laser beam. Using a pretreatment process employing a palladium based activator and a subsequent rinsing process, a seeding layer was selectively deposited within the laser roughened structures. The laser patterned tracks were metalized selectively by electroless plating using various metal layers. Using the same process, vias were laser drilled into the packaging. Thereby, interconnects and multilayer systems could be realized by the new process.
Keywords
"Injection molding","Substrates","Packaging","Metallization","Electromagnetic compatibility","Wires","Resistance"
Publisher
ieee
Conference_Titel
Microelectronics Packaging Conference (EMPC), 2015 European
Type
conf
Filename
7390745
Link To Document