Lamination of 3D structures in LTCC using elastomer bags

Lamination is an important step in the production of three-dimensional structures using green ceramic tapes. A lot of research was devoted to the refinement of the lamination process; a certain number of lamination methods are known from the literature. The present work deals with the evaluation of the method in which elastomer bags are used to carry out the isostatic thermo-compression lamination of green tapes to build 3D structures. With the help of the example of a hot-film flow sensor a technically unsophisticated way to laminate a green tape onto the inner surface of a metal cylinder is demonstrated. Furthermore, test results for lamination of LTCC substrates with cavities of large aspect ratio are presented.