Synchronization control for twin-axes table drive system

This paper presents new synchronization control method for twin-axes table drive system. In this system, the synchronization error disturbs high precision and a fast response time to cause serious vibration. It is caused by a motion error due to a characteristics change of a twin-axes table drive system. In the case of synchronization error suppression, the model of motion characteristics of a twin-axes table drive system is necessary and the time delay in a servo controller has to compensate. The proposed method consists new predictive synchronization error compensation algorithm to reject of the transfer delay time influence of servo controller in a state with the axis interference. The proposed method is designed by using synchronization torque error, velocity error and position error. The proposed method is verified by the simulations that the proposed method is robust as compared to the without predictive function on the twin-axes table drive system.