A low pressure organic vapor phase deposition chamber

In this paper we present a low Cost, low pressure Organic Vapor Phase Deposition chamber. The chamber allows multilayer deposition of organic materials in a same batch. The chamber was made on a very low budget, considering similar systems used in micro component fabrication. Anthracene, an organic material, was deposited onto Indium tin oxide (ITO) coated glass to test and characterize the chamber. Depositing was proved and analyzed regarding uniformity, adhesion and thickness.