Study on the new structure of vertical cavity surface emitting laser and its beam characteristics

The traditional Vertical cavity surface emitting laser (VCSEL) circular electrode structure had the problems such as the uneven of current injection and poor beam quality, this paper we presented a new designed method VCSEL electrode structure, namely radiation electrode VCSEL, thereby improved the uniformity of the current injection and laser beam quality. Experimental, we prepared red VCSEL using the process for preparing a semiconductor device, and we tested the beam characteristics of this new electrode structure VCSEL, the results showed that this designed approach significantly improved the beam quality of VCSEL device.