The design of Fabry Perot interference and coupling loss double modulation optical fiber MOEMS acoustic sensor

The shortcoming of traditional optical fiber Fabry-Perot cavity acoustic sensor lies in that the coupling-loss caused by MOEMS(Micro-Opto-Electro-Mechanical Systems)membrane bending is not considered, which results in that it is difficult to further improve the accuracy of sensor. Hence, this paper puts forward a new design plan: derive the formulae to calculate the coupling loss due to acoustic-sensitive membrane bending, modify the power transfer coefficient in traditional design methods, devise a double modulation scheme according to theories of FP(Fabry-Perot) interference and coupling loss. It is proved that the new design is feasible after laboratory simulating, making and testing the new MOEMS fiber sensor.