An optimized design of a large stroke beam flexure-based parallel nano manipulator

In this paper, we improve the previous results for a bi-axial large stroke beam-flexure nano-manipulating servo stage by an optimized design. By means of elliptical integrals, the analytical results of the undesired motions of the key kinematic decoupling component (i.e. Π-shaped beam flexures) can be obtained, and then a set of optimized geometric parameters is provided. The overall design significantly reduces error motions, which is desired to support large stroke XY nano manipulation. A robust control algorithm is developed for nano-manipulation purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the operating workspace up to 1.5 mm × 1.5 mm and the error of 77.8 nm (RMS) when tracking a circular trajectory with a diameter 1.0 mm.