Title :
Design of a tunable MSM photodetector for photonic integrated circuits
Author :
K. Komirisetty;N. Greene;D. Geddis
Author_Institution :
Department of Engineering, Norfolk State University, VA 23504, USA
Abstract :
This paper presents the design and fabrication of an integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP. Tuning is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater which is collocated on the opposite side of the PD substrate.
Keywords :
"Indium tin oxide","Optical resonators","Photodetectors","Silicon","Indium phosphide","III-V semiconductor materials","Tuning"
Conference_Titel :
Microwave and Photonics (ICMAP), 2015 International Conference on
Print_ISBN :
978-1-4673-6897-1
DOI :
10.1109/ICMAP.2015.7408772
