DocumentCode
3748164
Title
State-of-the-art GaN vertical power devices
Author
Tetsu Kachi
Author_Institution
Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan
fYear
2015
Abstract
Recent progress and developing issues of GaN vertical power devices are reviewed. Quality improvement of GaN substrates activates the research. 2kV level pn diodes and 1.5kV level vertical transistors have been reported recently. However, some issues to be solved still exist to show high ability of GaN.
Keywords
"Gallium nitride","Substrates","Leakage currents","Epitaxial layers","Logic gates","Surface treatment","MOSFET"
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN
2156-017X
Type
conf
DOI
10.1109/IEDM.2015.7409708
Filename
7409708
Link To Document