• DocumentCode
    3748238
  • Title

    Transport mechanism in sub 100?C processed high mobility polycrystalline ZnO transparent thin film transistors

  • Author

    P. B. Pillai;M. M. De Souza

  • Author_Institution
    Department of EEE, University of Sheffield, S1 3JD, Sheffield, UK
  • fYear
    2015
  • Abstract
    We demonstrate high performance ZnO TFTs with record field effect mobility 229 cm2/V.s, on/off ratio exceeding 107 (limited only by our simple device structure) and sub threshold swing (S) <;150 mV/dec, surpassing the performance of many reported amorphous Indium Gallium Zinc Oxide (a-IGZO) thin film transistors.1,2 The tail state distribution of the density of states (DOS) in ZnO extracted via 2D numerical simulations matched to experiment, demonstrates unequivocally a similar mobility mechanism that underpins all Transparent Conducting Oxides (TCOs)-whether amorphous or not. The characteristic Temperature of ZnO is found to be ~463 K and the tail state density of states (DOS) is ~1.3 ×1020cm-3eV-1.
  • Keywords
    "Zinc oxide","II-VI semiconductor materials","Thin film transistors","Performance evaluation","Logic gates","Electron traps"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2015 IEEE International
  • Electronic_ISBN
    2156-017X
  • Type

    conf

  • DOI
    10.1109/IEDM.2015.7409785
  • Filename
    7409785