Title :
1.3 Mega pixels CCD pH imaging sensor with 3.75 ?m spatial resolution
Author :
Y. Edo;Y. Tamai;S. Yamazaki;Y. Inoue;Y. Kanazawa;Y. Nakashima;T. Yoshida;T. Arakawa;S. Saitoh;M. Maegawa;M. Ohnishi;M. Kitao;T. Nakahashi;Y. Suzuki;F. Dasai;J. Nakai;H. Kawanishi;N. Awaya;K. Sawada
Author_Institution :
Sharp Corporation, 1 Asahi, Daimon-cho, Fukuyama 721-8522, Japan
Abstract :
We have demonstrated for the first time a megapixel (1.3M pixels) CCD pH imager featuring a flash-injection-of-signal-electrons scheme. With a spatial resolution of 3.75μm and pH resolution of 0.16pH at 27.5fps we believe this is a promising device technology for applications such as high throughput DNA sequencing and label-free cell measurement system with sub-cell-size spatial resolution and real-time response.
Keywords :
"Charge coupled devices","Electric potential","Substrates","Sensitivity","Spatial resolution","Sensor arrays"
Conference_Titel :
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN :
2156-017X
DOI :
10.1109/IEDM.2015.7409793
