Title :
Optical performance study of BSI image sensor with stacked grid structure
Author :
Yun-Wei Cheng;Tsung-Han Tsai;Chun-Hao Chou;Kuo-Cheng Lee;Hsin-Chi Chen;Yung-Lung Hsu
Author_Institution :
FAB 14A, Taiwan Semiconductor Manufacturing Company, 1-1, Nan-Ke North Rd., Tainan Science Park, Tainan City 741-44, Taiwan, R.O.C.
Abstract :
Stacked grid structure is implemented into back-side illumination (BSI) image sensors and device performance for various grid design including dimension and height has been investigated. Simulated angular response shows less quantum efficiency (QE) degradation in large incident angle and SNR-10 has a ~10% improvement for devices with stacked grid structure.
Keywords :
"Optical crosstalk","Optical imaging","Optical sensors","Image sensors","Optical filters","Crosstalk","Optical scattering"
Conference_Titel :
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN :
2156-017X
DOI :
10.1109/IEDM.2015.7409801
