• DocumentCode
    3748253
  • Title

    Optical performance study of BSI image sensor with stacked grid structure

  • Author

    Yun-Wei Cheng;Tsung-Han Tsai;Chun-Hao Chou;Kuo-Cheng Lee;Hsin-Chi Chen;Yung-Lung Hsu

  • Author_Institution
    FAB 14A, Taiwan Semiconductor Manufacturing Company, 1-1, Nan-Ke North Rd., Tainan Science Park, Tainan City 741-44, Taiwan, R.O.C.
  • fYear
    2015
  • Abstract
    Stacked grid structure is implemented into back-side illumination (BSI) image sensors and device performance for various grid design including dimension and height has been investigated. Simulated angular response shows less quantum efficiency (QE) degradation in large incident angle and SNR-10 has a ~10% improvement for devices with stacked grid structure.
  • Keywords
    "Optical crosstalk","Optical imaging","Optical sensors","Image sensors","Optical filters","Crosstalk","Optical scattering"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2015 IEEE International
  • Electronic_ISBN
    2156-017X
  • Type

    conf

  • DOI
    10.1109/IEDM.2015.7409801
  • Filename
    7409801
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3748253