Title :
High dose efficiency, ultra-high resolution amorphous selenium/CMOS hybrid digital X-ray imager
Author :
C. C. Scott;A. Parsafar;A. El-Falou;P. M. Levine;K. S. Karim
Author_Institution :
Department of Electrical and Computer Engineering, University of Waterloo Waterloo, Ontario, CANADA N2L 3G1
Abstract :
We demonstrate measured X-ray dose efficiency results from a 5.6-μm × 6.25-μm pixel-pitch direct-conversion amorphous selenium/CMOS hybrid X-ray imager. Compared to existing scintillator-based imagers, our approach enables up to 100× gains in DQE at spatial frequencies of 20-60 cycles/mm, which could radically accelerate bioengineering research. The measured MTF is 50% at 32 cycles/mm, corresponding to a 16-μm effective object size. We also demonstrate a MTF model which confirms experimental results with an RMS error of 0.02.
Keywords :
"X-ray imaging","Imaging","CMOS integrated circuits","Spatial resolution","CMOS technology","In vivo"
Conference_Titel :
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN :
2156-017X
DOI :
10.1109/IEDM.2015.7409803