Title :
Suspended AlGaN/GaN membrane devices with recessed open gate areas for ultra-low-power air quality monitoring
Author :
Peter Offermans;Ahmed Si-Ali;Greja Brom-Verheyden;Karen Geens;Silvia Lenci;Marleen Van Hove;Stefaan Decoutere;Rob Van Schaijk
Author_Institution :
imec/Holst Centre, Eindhoven, The Netherlands
Abstract :
We have developed a novel gas sensor platform for ultra-low-power air quality monitoring based on suspended AlGaN/GaN membranes fabricated on 8 inch Si(111) wafers. Due to precise sensing area recessing, the device shows excellent sensitivity to NO2, a major air pollutant, allowing the detection of single-ppb steps in the gas concentration. A key feature of the device is the small interference from humidity. We show extension of the platform to NH3, H2 and CO2 detection.
Keywords :
"Aluminum gallium nitride","Wide band gap semiconductors","Sensitivity","Sensors","HEMTs","Heating","Humidity"
Conference_Titel :
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN :
2156-017X
DOI :
10.1109/IEDM.2015.7409823