Title :
Silicon based THz dielectric waveguides
Author :
Quan Xue;Haotian Zhu;Jianan Hui;Stella W. Pang
Author_Institution :
State Key Laboratory of Millimeter Waves, Centre for Biosystems, Neuroscience and Nanotechnology, Department of Electronic Engineering, and CityU Shenzhen Research Institute, City University of Hong Kong, Hong Kong
Abstract :
In this paper, four types of silicon based THz dielectric waveguide are introduced. The silicon based THz dielectric waveguides are all fabricated by DRIE technology. The losses of these dielectric waveguides are very low.
Keywords :
"Silicon","Glass","Power transmission lines","Dielectric losses","Fabrication","Transmission line measurements"
Conference_Titel :
Microwave Conference (APMC), 2015 Asia-Pacific
Print_ISBN :
978-1-4799-8765-8
DOI :
10.1109/APMC.2015.7411579
