DocumentCode
3749867
Title
Welcome letter
Author
Paul M. Feeney;Robert L. Rhoades
fYear
2015
Firstpage
1
Lastpage
2
Abstract
Welcome to the 2015 International Conference on Planarization/CMP Technology! This year´s conference is held in Chandler, Arizona, USA (southeast edge of Phoenix) on September 30 ? October 2 at the Wild Horse Pass Hotel and Casino resort. The conference is co-sponsored by Clarkson University, the American Vacuum Society (NCCAVS), and IEEE. We are honored to have the annual CAMP conference join us for this year only (the next CAMP conference will be in August 2016).
Keywords
Europe
Publisher
ieee
Conference_Titel
Planarization/CMP Technology (ICPT), 2015 International Conference on
Type
conf
Filename
7411945
Link To Document