Three dimensional pH - potential diagram of cobalt slurry with corrosion rate

Though Pourbaix diagram is useful for understanding metal corrosion intuitively, corrosion rate of CMP process cannot be obtained because the diagram is calculated based on thermodynamic equilibrium theory with limited chemical species. In this work, we made pH-potential diagram of our newly developed cobalt CMP slurry with corrosion rate axis by using the electrochemical method. As a result, this three dimensional diagram was found to be powerful method to expect corrosion issue of actual CMP process.