Friction monitoring of conventional diamond conditioner and its application

One of the major issues of the conventional diamond conditioners is performance inconsistency along consumables lifetime. Thus, optimization of process control for the conventional conditioners is strongly recommended to overcome the performance issues. In present study, investigations on friction signal of the conventional conditioners were performed. Then, a correlation between performance of pad conditioning and friction signal had been made. Finally, an application of the relationship to extend pad lifetime while maintaining polishing performance was suggested.