Title :
Study of inhibition mechanism of glycine on the electrochemical behavior of Mo in the alkaline slurry
Author :
Guang Yang; Hui Feng; Xu Wang; Xin-Ping Qu
Author_Institution :
State key lab of ASIC and system, Fudan University, Shanghai, 200433, China
Abstract :
We have found that glycine has inhibition effect on the CMP of Molybdenum (Mo) in alkaline slurry using H2O2 as oxidizer. In this work the inhibition mechanism is investigated using pontentiodynamic polarization, static etch and XPS.
Keywords :
"Films","Slurries","Corrosion","Irrigation"
Conference_Titel :
Planarization/CMP Technology (ICPT), 2015 International Conference on
