• DocumentCode
    3749921
  • Title

    Study of inhibition mechanism of glycine on the electrochemical behavior of Mo in the alkaline slurry

  • Author

    Guang Yang; Hui Feng; Xu Wang; Xin-Ping Qu

  • Author_Institution
    State key lab of ASIC and system, Fudan University, Shanghai, 200433, China
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We have found that glycine has inhibition effect on the CMP of Molybdenum (Mo) in alkaline slurry using H2O2 as oxidizer. In this work the inhibition mechanism is investigated using pontentiodynamic polarization, static etch and XPS.
  • Keywords
    "Films","Slurries","Corrosion","Irrigation"
  • Publisher
    ieee
  • Conference_Titel
    Planarization/CMP Technology (ICPT), 2015 International Conference on
  • Type

    conf

  • Filename
    7412019
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3749921