A W-band single-pole single-throw switch using on-chip rectangular coaxial transmission line in 0.13-μm CMOS technology

In this paper, the characteristics of on-chip rectangular coaxial line (RCL) are analyzed and a single-pole single-throw (SPST) switch is demonstrated utilizing the RCL in a standard 0.13-μm CMOS technology. The characteristic impedance of the RCL is promoted to 20-54Ω range, which makes it convenient to design a 90° hybrid coupler. A SPST switch at W-band is designed utilizing the coupler and the measured results indicate that the insertion loss is ~3.8 dB and the isolation is better than 11 dB from 85 to 100 GHz with the peak value of 20.1dB at 94 GHz. The chip size is 0.26×0.26 mm² excluding the testing pads.