Title :
Preliminarily propagation loss evaluation of core-top etched waveguide for step-core LP21 mode converter
Author :
Ryosuke Sakata;Kazuhiro Tanabe;Ryo Tanaka;Haisong Jiang;Kiichi Hamamoto
Author_Institution :
I-EggS, Kyushu Univ., 6-1, Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
Abstract :
Propagation loss of core-top etched Si/SiO2 waveguide was preliminarily evaluated for the first time. As a result, approximately 8 dB/cm increase has been confirmed after core-top etching.
Keywords :
"Propagation losses","Optical waveguides","Silicon","Iterative closest point algorithm","Etching","Scattering","Microoptics"
Conference_Titel :
Microoptics Conference (MOC), 2015 20th
Print_ISBN :
978-4-8634-8487-0
DOI :
10.1109/MOC.2015.7416460