Title :
Microstructure on titanium oxide and silicon nitride formed by KrF excimer laser ablation
Author :
Shimoda, T. ; Takahashi, K. ; Obara, M.
Author_Institution :
Dept. of Electron. & Electr. Eng., Keio Univ., Yokohama, Japan
Abstract :
We have created conical microstructures on sintered flat TiO/sub 2/ and Si/sub 3/N/sub 4/ by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.
Keywords :
X-ray photoelectron spectra; laser ablation; scanning electron microscopy; silicon compounds; surface composition; surface structure; titanium compounds; KrF; KrF excimer laser ablation; SEM; Si/sub 3/N/sub 4/; TiO/sub 2/; XPS; chemical composition; conical microstructures; near-threshold KrF laser ablation; sintered flat Si/sub 3/N/sub 4/; sintered flat TiO/sub 2/; surface morphology; Ceramics; Chemical analysis; Chemical lasers; Laser ablation; Laser sintering; Microstructure; Shape; Silicon; Surface morphology; Titanium;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967712
