A flexible parallel nanopositioner for large-stroke micro/nano machining

A flexible nanopositioner with large stroke, high bandwidth, high precision and multi-Degrees-of-Freedom (multi-DOF) is really desired for micro/nano machining. The proposed nanopositioner is guided by four pairs of differential lever displacement amplifiers (DLDA) which consists of flexible hinge, also, kinetostatics modeling is conducted by using the Pseudo-Rigid Body (PRB) method. After a series of mechanism optimal designs, the performance of the designed nanopositioner is verified by using the Finite Element Analysis (FEA) method. The experimental results indicate that the mechanism displacement amplification ratio can reach up to 7.8, thus the maximum output displacement can achieve around 0.78 mm and the amplification ratio won´t influenced by the variations of input actuation force or input displacement. All the results consistently testify the proposed device possesses satisfactory performance for fulfilling the practical precision machining tasks.